Beilstein J. Nanotechnol.2015,6, 451–461, doi:10.3762/bjnano.6.46
different samples such as calibration standard, optical grating, EPROM chip, self-assembled monolayers and atomic step-edges of gold demonstrate the high stability of the nested scanner design and the performance of self-sensing TMR cantilevers.
Keywords: atomic force microscopy (AFM); magnetomechanical
effects; magnetostriction; scanning probe microscopes and components; Introduction
Since its invention in the 1980s [1] the atomic force microscope (AFM) became a versatile tool frequently used in nanoscale metrology, biosensing, maskless lithography and high density data storage with nearly as many
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Figure 1:
Schematic and photo of the setup including the optical beam deflection and the nested scanner desig...